26ème Congrès Général de la SFP

Monochromatic sources of ions and electrons for nanosciences

Non programmé

20m

Centre des Congrès de la Villette (Cité des sciences et de l'Industrie, Paris)

Poster MC8 Dernières avancées dans le domaine des technologies quantiques Session Poster 2: MC1, MC4, MC8, MC10, MC12, MC14, MC20, MC21, MC23, MC24, MC25, REDP

Orateur

Clelia Bastelica (Université Paris-Saclay, CNRS, Laboratoire Aimé Cotton, 91405, Orsay, France)

Description

Our projects aims at achieving breakthroughs in focused ion and electron beams, exploiting monochromaticity in the low-energy domain (eV-keV). Using ionization of a neutral atomic species and simultaneous production, detection and control of both the ion and the electron we propose to develop three innovative prototypes:
• 1) A focused ion beam using feedback control with unprecedented focused properties. This will be used to realize semiconductor circuit-editing at the (sub-)nm scale.
• 2) A deterministic source of (potentially) any type of ion for controlled implantation at the nm level. This will be used for on-demand doping of quantum devices.
• 3) A high-resolution electron-energy-loss microscope (HREELM) with precise knowledge of the electron energy and the position on the sample. It will be used to realize both imaging and vibrational spectroscopy for surface analysis.